[图书][B] Understanding and learning statistics by computer
MCK Yang, DH Robinson - 1986 - books.google.com
This textbook provides an introduction to statistics for computer users or computer science
undergraduates. The main emphasis here is on how to use the computer to understand …
undergraduates. The main emphasis here is on how to use the computer to understand …
Practical photolithography for modern semiconductor production
WG Hertlein - … Technology for Integrated Circuit Fabrication and …, 1987 - spiedigitallibrary.org
The impact of some photolithographic processing parameters on the final production results
in the modern semiconductor device manufacture and also their definition, is discussed …
in the modern semiconductor device manufacture and also their definition, is discussed …
Low dose implant performance monitoring of a medium current ion implanter
R Simonton, T Breeden - Nuclear Instruments and Methods in Physics …, 1989 - Elsevier
The dose repeatability and uniformity of certain low dose implants are of critical importance
in optimizing yields in VLSI processes. The need to closely control implant variations …
in optimizing yields in VLSI processes. The need to closely control implant variations …
Measurement of Particles From Equipment and Processes: The Particles-Per-Wafer-Per Pass (Pwp) Method
B Tullís - Particle Control for Semiconductor Manufacturing, 2018 - taylorfrancis.com
This chapter discusses the particles-per-wafer-per-pass (PWP) methodology of measuring
particles added to wafers when these wafers are passed through one or more pieces of …
particles added to wafers when these wafers are passed through one or more pieces of …
Techniques for dose matching between ion implanters
P Lundquist, S Mehta, T Black, D Jackson - Nuclear Instruments and …, 1991 - Elsevier
Dose matching between systems installed in a device manufacturer's fab is a critical issue in
ion implantation, especially when the process is to be transferred from one system to …
ion implantation, especially when the process is to be transferred from one system to …
Manufacturability
S Sivaram - Chemical Vapor Deposition: Thermal and Plasma …, 1995 - Springer
This chapter is different from the rest of the book. It is not directly pertinent to the art or
science of CVD; instead it deals with the development process. It provides a framework to …
science of CVD; instead it deals with the development process. It provides a framework to …