This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This review provides a summary of work on the resonant nonlinear dynamics of micro-and
nanoelectromechanical systems. This research area, which has been active for …

An investigation into the response of a resonant microbeam to anelectric actuation is
presented. A nonlinear model is used to accountfor the mid-plane stretching, a DC …

We study the pull-in instability in microelectromechanical (MEMS) resonators and find that
characteristics of the pull-in phenomenon in the presence of AC loads differ from those …

Graphene is the strongest material ever studied and can be an efficient substitute for silicon.
This six-volume handbook focuses on fabrication methods, nanostructure and atomic …

In order to compensate for the loss of performance when scaling resonant sensors down to
NEMS, it proves extremely useful to study the behavior of resonators up to very high …

We present modeling, analysis and experimental investigation for nonlinear resonances and
the dynamic pull-in instability in electrostatically actuated resonators. These phenomena are …

Electrostatically-actuated resonant microbeam devices have garnered significant attention
due to their geometric simplicity and broad applicability. Recently, some of this focus has …

We investigate the response of a microbeam-based resonant sensor to superharmonic and
subharmonic electric actuations using a model that incorporates the nonlinearities …

A method of active frequency tuning on comb-shape micro resonators has been successfully
demonstrated by means of localized stressing effects. A mechanical beam structure that can …