Nanoscale block copolymer self‐assembly and microscale polymer film dewetting: progress in understanding the role of interfacial energies in the formation of …

K Brassat, JKN Lindner - Advanced Materials Interfaces, 2020 - Wiley Online Library
Block copolymer (BCP) self‐assembly (SA) can be exploited for next‐generation lithography
for the advanced nanopatterning of surfaces with versatile nanoscale features. To render …

High Aspect Ratio Nanoscale Pores through BCP-Based Metal Oxide Masks and Advanced Dry Etching

A Esmeraldo Paiva, MS Gerlt, NF Laubli… - … applied materials & …, 2023 - ACS Publications
The reliable and regular modification of the surface properties of substrates plays a crucial
role in material research and the development of functional surfaces. A key aspect of this is …

Hierarchical order in dewetted block copolymer thin films on chemically patterned surfaces

F Ferrarese Lupi, TJ Giammaria, A Miti, G Zuccheri… - ACS …, 2018 - ACS Publications
We investigated the dewetting process on flat and chemically patterned surfaces of ultrathin
films (thickness between 2 and 15 nm) of a cylinder forming polystyrene-block-poly (methyl …

High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐b‐PMMA Block Copolymer Nanomasks during Mask Development

J Bürger, H Venugopal, D Kool… - Advanced Materials …, 2022 - Wiley Online Library
Nanolithography with self‐assembled block copolymers (BCPs) is an emerging competitive
alternative to conventional lithography, which is currently reaching its limits with regard to …

Development and Synchrotron‐Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques

M Dialameh, F Ferrarese Lupi, P Hönicke… - … status solidi (a), 2018 - Wiley Online Library
The continuous and aggressive scaling in semiconductor technology results in the
integration of increasingly complex 3D architectures and new materials. The realization of …

Modification of block copolymer lithography masks by O2/Ar plasma treatment: insights from lift-off experiments, nanopore etching and free membranes

K Brassat, D Kool, JKN Lindner - Nanotechnology, 2019 - iopscience.iop.org
Block copolymer lithography allows for the large-area patterning of surfaces with self-
assembled nanoscale features. The created nanostructured polymer films can be applied as …

Block copolymer self-assembly assisted fabrication of laterally organized-and stacked-nanoarrays

V Suresh, AB Chew, CYL Tan, HR Tan - Nanotechnology, 2022 - iopscience.iop.org
Block copolymer (BCP) self-assembly processes are often seen as reliable techniques for
advanced nanopatterning to achieve functional surfaces and create templates for …

[PDF][PDF] Unconventional lithography for patterned nanomaterials

Y Li, Q Yan, N Koshizaki - Nanotechnology, 2017 - scholar.archive.org
Patterned nanostructure materials have important applications in photonic crystals, SERS,
micro/nanodevices etc [1]. Conventional nanofabrication technologies for the patterned …

An Etching Method for Fabricating Anisotropic Silicon Nanostructures with Vertical and Smooth Sidewalls

F Yin, Y Li, W Yue, C Zhang - … and Nanotechnology Letters, 2019 - ingentaconnect.com
Various nanostructures, such as nanopillars and nanoholes, have served as vital functional
components for construction of high-performance electronic and photonic devices. Precise …

[PDF][PDF] The impact of silicon nano-texture morphology on solar cell integration, performance, and degradation

MU Khan - 2022 - unsworks.unsw.edu.au
Silicon nano-texture, also referred to as black silicon, has excellent light trapping properties
and is a potential solution to overcome optical losses in silicon solar cell. However …