Mode interactions have recently become the focus of intense research in micro/
nanoelectromechanical systems (M/NEMS) due to their ability to improve device …

This review describes recent experimental developments in the study of nonlinearities for
flexural microelectromechanical systems (MEMS) structures. It includes motivation for …

We propose a non‐intrusive deep learning‐based reduced order model (DL‐ROM) capable
of capturing the complex dynamics of mechanical systems showing inertia and geometric …

Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is still
attracting increasing interest from the sensors community especially when the nonlinear …

Temperature compensation with high accuracy is crucial for improving the performance of
MEMS resonant accelerometers. In this paper, we propose an effective temperature …

MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest
because of their smaller size and better integrability as opposed to their quartz counterparts …

Abstract Microsystems (or Micro Electro Mechanical Systems, MEMS) are important
components of many popular products in the consumer market and are one of the enabling …

Due to material mismatch, silicon differential resonant accelerometers (SDRAs) experience
unpredictable thermal stress that is challenging to account for. An SDRA with a stress …

This paper presents a high-performance MEMS accelerometer with a DC/AC electrostatic
stiffness tuning capability based on double-sided parallel plates (DSPPs). DC and AC …

We investigate the effects of contact in MEMS oscillators by fabricating, testing, and
simulating a simple device featuring bilinear stiffness. When the shuttle oscillation exceeds a …