Structured illumination ptychography and at-wavelength characterization with an EUV diffuser at 13.5 nm wavelength
Structured illumination is essential for high-performance ptychography. Especially in the
extreme ultraviolet (EUV) range, where reflective optics are prevalent, the generation of …
extreme ultraviolet (EUV) range, where reflective optics are prevalent, the generation of …
Wavelength-multiplexed multi-mode EUV reflection ptychography based on automatic differentiation
Ptychographic extreme ultraviolet (EUV) diffractive imaging has emerged as a promising
candidate for the next generationmetrology solutions in the semiconductor industry, as it can …
candidate for the next generationmetrology solutions in the semiconductor industry, as it can …
Mitigating tilt-induced artifacts in reflection ptychography via optimization of the tilt angles
S Senhorst, Y Shao, S Weerdenburg, R Horsten… - Optics …, 2024 - opg.optica.org
Ptychography in a reflection geometry shows great promise for non-destructive imaging of 3-
dimensional nanostructures at the surface of a thick substrate. A major challenge to obtain …
dimensional nanostructures at the surface of a thick substrate. A major challenge to obtain …
Illumination diversity in multiwavelength extreme ultraviolet ptychography
With the development of high harmonic generation (HHG), lensless extreme-ultraviolet
(XUV) imaging at nanoscale resolution has become possible with table-top systems …
(XUV) imaging at nanoscale resolution has become possible with table-top systems …
Soft X-ray chemically sensitive ptychographic imaging of 3D nano-objects
The results of a soft X-ray chemically sensitive ptychographic imaging of non-planar
nanoscale 3D objects-atom probe tomography tips, with resolution down to 12 nm at 800 eV …
nanoscale 3D objects-atom probe tomography tips, with resolution down to 12 nm at 800 eV …
[PDF][PDF] 高次谐波与阿秒脉冲在成像中的应用与前景(特邀)
李博洋， 王虎山， 付玉喜 - Acta Optica Sinica, 2024 - researching.cn
摘要高次谐波技术的出现为现代高分辨成像应用提供了新一代的高质量光源.
高次谐波光源可以提供高相干性的极紫外/软X 射线超短脉冲, 在近20 年间带动了桌面高分辨 …
高次谐波光源可以提供高相干性的极紫外/软X 射线超短脉冲, 在近20 年间带动了桌面高分辨 …
Illumination diversity in multi-wavelength extreme ultraviolet ptychography
With the development of high harmonic generation (HHG), lensless extreme-ultraviolet
(XUV) imaging at nanoscale resolution has become possible with table-top systems …
(XUV) imaging at nanoscale resolution has become possible with table-top systems …