A 7nm CMOS technology platform for mobile and high performance compute application

S Narasimha, B Jagannathan, A Ogino… - 2017 IEEE …, 2017 - ieeexplore.ieee.org
We present a fully integrated 7nm CMOS platform featuring a 3 rd generation finFET
architecture, SAQP for fin formation, and SADP for BEOL metallization. This technology …
被引用次数：66 相关文章

[引用][C] A 7nm CMOS technology platform for mobile and high performance compute application

S Narasimha, B Jagannathan, A Ogino… - 2017 IEEE International …, 2017 - cir.nii.ac.jp

A 7nm CMOS Technology Platform for Mobile and High Performance Compute Application

S Narasimha, B Jagannathan, A Ogino, D Jaeger… - avesis.ankara.edu.tr
We present a fully integrated 7nm CMOS platform featuring a 3rd generation finFET
architecture, SAQP for fin formation, and SADP for BEOL metallization. This technology …