Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation

M Volatier, D Duchesne, R Morandotti, R Ares… - …, 2010 - iopscience.iop.org
Semiconductor nanowaveguides are the key structure for light-guiding nanophotonics
applications. Efficient guiding and confinement of single-mode light in these waveguides …
被引用次数：98 相关文章
[PDF] archive.org

[PDF][PDF] Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation

M Volatier, D Duchesne, R Morandotti, R Ares… - …, 2010 - scholar.archive.org
Semiconductor nanowaveguides are the key structure for light-guiding nanophotonics
applications. Efficient guiding and confinement of single-mode light in these waveguides …

Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation

M Volatier, D Duchesne, R Morandotti… - …, 2010 - ui.adsabs.harvard.edu
Semiconductor nanowaveguides are the key structure for light-guiding nanophotonics
applications. Efficient guiding and confinement of single-mode light in these waveguides …

Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation

M Volatier, R Ares, V Aimez, D Duchesne… - Nanotechnology …, 2010 - inis.iaea.org
[en] Semiconductor nanowaveguides are the key structure for light-guiding nanophotonics
applications. Efficient guiding and confinement of single-mode light in these waveguides …

Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation.

M Volatier, D Duchesne, R Morandotti, R Arès… - …, 2010 - europepmc.org
Semiconductor nanowaveguides are the key structure for light-guiding nanophotonics
applications. Efficient guiding and confinement of single-mode light in these waveguides …
[PDF] researchgate.net

[PDF][PDF] Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation

M Volatier, D Duchesne, R Morandotti, R Ares… - …, 2010 - researchgate.net
Semiconductor nanowaveguides are the key structure for light-guiding nanophotonics
applications. Efficient guiding and confinement of single-mode light in these waveguides …

[引用][C] Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation

M Volatier, D Duchesne, R Morandotti, R Arès… - Nanotechnology, 2010 - cir.nii.ac.jp
Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using
chlorine ICP etching with N<sub>2</sub>-promoted passivation | CiNii Research CiNii 国立 …
[PDF] academia.edu

[PDF][PDF] Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation

M Volatier, D Duchesne, R Morandotti, R Ares… - …, 2010 - academia.edu
Semiconductor nanowaveguides are the key structure for light-guiding nanophotonics
applications. Efficient guiding and confinement of single-mode light in these waveguides …

Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation

M Volatier, D Duchesne, R Morandotti… - …, 2010 - pubmed.ncbi.nlm.nih.gov
Semiconductor nanowaveguides are the key structure for light-guiding nanophotonics
applications. Efficient guiding and confinement of single-mode light in these waveguides …

[引用][C] Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP etching with N2-promoted passivation

M VOLATIER, D DUCHESNE, R MORANDOTTI… - …, 2010 - Institute of Physics