Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

M Brihoum, G Cunge, M Darnon, D Gahan… - Journal of Vacuum …, 2013 - pubs.aip.org
Changes in the ion flux and the time-averaged ion distribution functions are reported for
pulsed, inductively coupled RF plasmas (ICPs) operated over a range of duty cycles. For …
被引用次数：37 相关文章

Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

M Brihoum, G Cunge, M Darnon, O Joubert… - Journal of Vacuum …, 2013 - inis.iaea.org
[en] Changes in the ion flux and the time-averaged ion distribution functions are reported for
pulsed, inductively coupled RF plasmas (ICPs) operated over a range of duty cycles. For …

Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

M Brihoum, G Cunge, M Darnon, D Gahan… - Journal of Vacuum …, 2013 - pubs.aip.org
Changes in the ion flux and the time-averaged ion distribution functions are reported for
pulsed, inductively coupled RF plasmas (ICPs) operated over a range of duty cycles. For …

[引用][C] Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

M Brihoum, G Cunge, M Darnon… - Journal of Vacuum …, 2013 - hal.univ-grenoble-alpes.fr
Ion flux and ion distribution function measurements in synchronously pulsed inductively
coupled plasmas - Université Grenoble Alpes Accéder directement au contenu Documentation …

Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

M Brihoum, G Cunge, M Darnon, O Joubert… - Journal of Vacuum …, 2013 - osti.gov
Changes in the ion flux and the time-averaged ion distribution functions are reported for
pulsed, inductively coupled RF plasmas (ICPs) operated over a range of duty cycles. For …

[引用][C] Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

M Brihoum, G Cunge, M Darnon, D Gahan… - Journal of Vacuum …, 2013 - hal.science
Ion flux and ion distribution function measurements in synchronously pulsed inductively
coupled plasmas - Archive ouverte HAL Accéder directement au contenu Documentation FR …

Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

M Brihoum, G Cunge, M Darnon, D Gahan… - Journal of Vacuum …, 2013 - oro.open.ac.uk
Changes in the ion flux and the time-averaged ion distribution functions are reported for
pulsed, inductively coupled RF plasmas (ICPs) operated over a range of duty cycles. For …

[引用][C] Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

M Brihoum, G Cunge, M Darnon… - Journal of Vacuum …, 2013 - ui.adsabs.harvard.edu
Ion flux and ion distribution function measurements in synchronously pulsed inductively
coupled plasmas - NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS …

[引用][C] Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

M Brihoum, G Cunge, M Darnon… - Journal of Vacuum …, 2013 - hal.univ-grenoble-alpes.fr
Ion flux and ion distribution function measurements in synchronously pulsed inductively
coupled plasmas - Université Grenoble Alpes Accéder directement au contenu Documentation …