Design and analysis of MEMS based piezoelectric micro pump integrated with micro needle

KS Rao, J Sateesh, K Guha, KL Baishnab… - Microsystem …, 2020 - Springer
This paper presents the design and simulation of piezoelectric micro pump integrated with
micro needle. The proposed micro pump adopted rectangular piezoelectric vibrator supplied …

Design and analysis of MEMS based piezoelectric micro pump integrated with micro needle

KS Rao, J Sateesh, K Guha, KL Baishnab… - Microsystem …, 2020 - dl.acm.org
This paper presents the design and simulation of piezoelectric micro pump integrated with
micro needle. The proposed micro pump adopted rectangular piezoelectric vibrator supplied …

[PDF][PDF] Design and analysis of MEMS based piezoelectric micro pump integrated with micro needle

KS Rao, J Sateesh, K Guha, KL Baishnab, P Ashok… - researchgate.net
This paper presents the design and simulation of piezoelectric micro pump integrated with
micro needle. The proposed micro pump adopted rectangular piezoelectric vibrator supplied …

[PDF][PDF] Design and analysis of MEMS based piezoelectric micro pump integrated with micro needle

KS Rao, J Sateesh, K Guha, KL Baishnab, P Ashok… - researchgate.net
This paper presents the design and simulation of piezoelectric micro pump integrated with
micro needle. The proposed micro pump adopted rectangular piezoelectric vibrator supplied …