Photonic integrated circuits fabricated using ion implantation

S Charbonneau, ES Koteles, PJ Poole… - IEEE Journal of …, 1998 - ieeexplore.ieee.org
Intermixing the wells and barriers of quantum-well (QW) laser heterostructures generally
results in an increase in the bandgap energy and is accompanied by changes in the …

A quantum-well-intermixing process for wavelength-agile photonic integrated circuits

EJ Skogen, JS Barton, SP Denbaars… - IEEE Journal of …, 2002 - ieeexplore.ieee.org
Wavelength-agile photonic integrated circuits are fabricated using a one-step ion
implantation quantum-well intermixing process. In this paper, we discuss, the issues in …

Low-energy ion-implantation-induced quantum-well intermixing

V Aimez, J Beauvais, J Beerens… - IEEE Journal of …, 2002 - ieeexplore.ieee.org
In this paper, we present the attractive characteristics of low-energy ion-implantation-
induced quantum-well intermixing of InP-based heterostructures. We demonstrate that this …

Quantum well intermixing

JH Marsh - Semiconductor science and technology, 1993 - iopscience.iop.org
Intermixing the wells and barriers of quantum well structures generally results in an increase
in the band gap and is accompanied by changes in the refractive index. A range of …

Quantum‐well intermixing for optoelectronic integration using high energy ion implantation

S Charbonneau, PJ Poole, PG Piva, GC Aers… - Journal of applied …, 1995 - pubs.aip.org
The technique of ion‐induced quantum‐well (QW) intermixing using broad area, high
energy (2–8 MeV As4+) ion implantation has been studied in a graded‐index separate …

Quantum-well intermixing in GaAs-AlGaAs structures using pulsed laser irradiation

BS Ooi, CJ Hamilton, K McIlvaney… - IEEE Photonics …, 1997 - ieeexplore.ieee.org
We report the use of a pulsed laser irradiation technique, using multiphoton absorption, to
promote quantum-well intermixing (QWI) in double-quantum-well GaAs-AlGaAs laser …

Plasma-induced quantum well intermixing for monolithic photonic integration

HS Djie, T Mei - IEEE Journal of selected topics in quantum …, 2005 - ieeexplore.ieee.org
Plasma-induced quantum well intermixing (QWI) has been developed for tuning the
bandgap of III-V compound semiconductor materials using an inductively coupled plasma …

Quantum-well intermixing for fabrication of lasers and photonic integrated circuits

D Hofstetter, B Maisenholder… - IEEE Journal of Selected …, 1998 - ieeexplore.ieee.org
Various applications of quantum-well intermixing, ranging from multiwavelength lasers to
complex photonic integrated circuits, are described. The fabrication of these GaAs-AlGaAs …

The enhancement of quantum well intermixing through repeated ion implantation

PJ Poole, PG Piva, M Buchanan, GC Aers… - Semiconductor …, 1994 - iopscience.iop.org
Quantum well (QW) intermixing has been performed using low-energy broad-area ion
implantation to increase the bandgap energy in a spatially selective manner. There is a …

Quantum well intermixing in material systems for 1.5 μm

JH Marsh, OP Kowalski, SD McDougall… - Journal of Vacuum …, 1998 - pubs.aip.org
Precise control over local optical and electrical characteristics across a semiconductor wafer
is a fundamental requirement for the fabrication of photonic integrated circuits. Quantum well …