Chemical-vapor deposited semiconducting diamond is an excellent sensor material for
harsh environments and high temperatures. The piezoresistive gauge factors measured at …

We report the observation of a very large piezoresistive effect in both polycrystalline and
homoepitaxial chemical‐vapor‐deposited diamond films. The gauge factor for …

Nearterm industrial applications require pressure sensors and acceleration sensors which
are able to operate at elevated temperatures and in harsh environments where conventional …

Chemical vapor deposited (CVD) polycrystalline diamond is inexpensive and can become a
commercially viable piezoresistive sensor material if its typical gauge factor (GF) exceeds …

The outstanding properties of diamond and the reproducible deposition of polycrystalline
diamond on large area substrates has made it an interesting base material for microsensors …

Diamond has attractive properties as an advanced electronic material. Its combination of
high carrier mobility, electric breakdown, and thermal conductivity results in the largest …

Diamond deposition processing and silicon photolithographic and etching techniques were
used to create undoped diamond diaphragms a few millimetres in diameter and 5–10 …

The piezoresistance and other characteristics of boron doped polycrystalline diamond films
(PDF's) were determined by analyzing free-standing films that had been formed on silicon …

The piezoresistive properties of strain gauges fabricated from chemical vapor deposited p-
type polycrystalline diamond films were investigated. The strain gauge pattern (500 μn long× …

Electrical and piezoresistive properties of chemical vapor-deposited boron-doped p-type
polycrystalline diamond films were investigated. The p-type polycrystalline diamond films of …