Low-loss lateral micromachined switches for high frequency applications
AQ Liu, M Tang, A Agarwal… - … of micromechanics and …, 2004 - iopscience.iop.org
Two novel lateral metal-contact radio-frequency microelectromechanical system (RF MEMS)
switches are reported. These switches are implemented with quasi-finite ground coplanar …
switches are reported. These switches are implemented with quasi-finite ground coplanar …
[HTML][HTML] Broadband radio frequency MEMS series contact switch with low insertion loss
M Li, Q Liu, Q Wu, Y Han - Microsystem Technologies, 2019 - Springer
A new radio frequency (RF) micro-electro-mechanical-system (MEMS) single cantilever
series contact switch is designed as a low-insertion-loss and low-power electronic …
series contact switch is designed as a low-insertion-loss and low-power electronic …
Extensive performance evaluations of RF MEMS single-pole-multi-throw (SP3T to SP14T) switches up to X-band frequency
This work presents wide range of compact and reliable single-pole-multi-throw (SPMT) radio
frequency (RF) microelectromechanical system (MEMS) switches where the M (output) …
frequency (RF) microelectromechanical system (MEMS) switches where the M (output) …
A novel three-state RF MEMS switch for ultrabroadband (DC-40 GHz) applications
YQ Zhu, L Han, LF Wang, JY Tang… - IEEE electron device …, 2013 - ieeexplore.ieee.org
Design, fabrication, and measurement results of a lateral dc-contact RF
microelectromechanical systems switch for ultrabroadband applications are presented in …
microelectromechanical systems switch for ultrabroadband applications are presented in …
Symmetric and compact single-pole multiple-throw (SP7T, SP11T) RF MEMS switches
This paper presents extremely compact single-pole multiple-throw radio frequency (RF)
microelectromechanical system switches, SP7T and SP11T, based on a symmetric circular …
microelectromechanical system switches, SP7T and SP11T, based on a symmetric circular …
A non-contact-type RF MEMS switch for 24-GHz radar applications
This paper presents the design, fabrication, and measurement results for a novel non-
contact-type radio-frequency (RF) microelectromechanical systems switch for 24-GHz radar …
contact-type radio-frequency (RF) microelectromechanical systems switch for 24-GHz radar …
Surface-micromachined capacitive RF switches with low actuation voltage and steady contact
In this paper, we report fabrication and dynamic characterization of low-actuation-voltage
capacitive radio frequency microelectromechanical systems (RF MEMS) switches with …
capacitive radio frequency microelectromechanical systems (RF MEMS) switches with …
A 50–100 GHz ohmic contact SPDT RF MEMS silicon switch with dual axis movement
S Sim, Y Lee, YH Jang, YS Lee, YK Kim… - Microelectronic …, 2016 - Elsevier
We firstly show the prototype of an ohmic contact Single-Pole Double-Throw Radio
Frequency Micro-Electro-Mechanical Systems (SPDT RF MEMS) switch operating at 50–100 …
Frequency Micro-Electro-Mechanical Systems (SPDT RF MEMS) switch operating at 50–100 …
A low-voltage lateral MEMS switch with high RF performance
Y Wang, Z Li, DT McCormick… - Journal of …, 2004 - ieeexplore.ieee.org
MEMS switches are one of the most promising future micromachined products that have
attracted numerous research efforts in recent years. The majority of MEMS switches reported …
attracted numerous research efforts in recent years. The majority of MEMS switches reported …
Lateral contact three-state RF MEMS switch for ground wireless communication by actuating rhombic structures
LF Wang, L Han, JY Tang… - Journal of …, 2012 - ieeexplore.ieee.org
A laterally actuated three-state RF microelectromechanical systems switch for ground
wireless communication applications is proposed, fabricated, and tested. By electrostatically …
wireless communication applications is proposed, fabricated, and tested. By electrostatically …