Optomechanical setups span a vast range of sizes and masses, as do their applications and
aims-from testing the foundations of the quantum theory to precision sensing and detecting …

In view of the integration of membrane resonators with more complex MEMS structures, we
developed a general fabrication procedure for circular shape SiN x membranes using Deep …

In view of the integration of membrane resonators with more complex MEMS structures, we
developed a general fabrication procedure for circular shape SiN $ _x $ membranes using …

Mechanical oscillators coupled to an electromagnetic cavity have emerged as a new frontier
in quantum optics. This coupling presents an opportunity for manipulating the quantum state …

High stress Si 3 N 4 membranes give rise to many optomechanical experiments [1–4]. A
great interest around them is created by their extraordinary mechanical properties, low …

We investigate the electromechanical actuation of a pair of suspended silicon nitride
membranes forming a monolithic optomechanical array. By controlling the membrane …

A detailed investigation of the structural and vibrational properties of various prestressed
silicon nitride membranes patterned with one-dimensional photonic crystal structures is …

We study the optomechanical properties of SiN membrane resonators through spectroscopic
and interferometric imaging techniques. We demonstrate ultra-high quality factors of 50× 10 …

Arrays of High Reflectivity SiN Photonic Crystal Membranes for Cavity Optomechanics Page 1
FW1E.3.pdf Frontiers in Optics / Laser Science © OSA 2018 Arrays of High Reflectivity SiN …

We present high-reflectivity mechanical resonators fabricated from AlGaAs heterostructures
for use in free-space optical cavities operating in the telecom wavelength regime. The …