Scheduling cluster tools in semiconductor manufacturing: Recent advances and challenges
Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …
controlled process modules. They have been increasingly used for wafer fabrication. This …
Petri nets and automatic control: A historical perspective
The goal of this paper is to overview the historical development of the field of Petri nets
(PNs) from a Systems Theory and Automatic Control perspective. It is intentionally not meant …
(PNs) from a Systems Theory and Automatic Control perspective. It is intentionally not meant …
[图书][B] Deadlock resolution in automated manufacturing systems: a novel Petri net approach
ZW Li, MC Zhou - 2009 - books.google.com
Deadlock problems in flexible manufacturing systems (FMS) have received more and more
attention in the last two decades. Petri nets are one of the more promising mathematical …
attention in the last two decades. Petri nets are one of the more promising mathematical …
Modeling, analysis and control of dual-arm cluster tools with residency time constraint and activity time variation based on Petri nets
Because of residency time constraints and activity time variation of cluster tools, it is very
difficult to operate such integrated semiconductor manufacturing equipment. This paper …
difficult to operate such integrated semiconductor manufacturing equipment. This paper …
An optimal deadlock prevention policy for flexible manufacturing systems using Petri net models with resources and the theory of regions
M Uzam - The International Journal of Advanced Manufacturing …, 2002 - Springer
In this paper, an optimal deadlock prevention policy for flexible manufacturing systems
(FMSs) is proposed. In an FMS, dead-locks can arise because of a limited number of shared …
(FMSs) is proposed. In an FMS, dead-locks can arise because of a limited number of shared …
A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints
With wafer residency time constraints for some wafer fabrication processes, such as low
pressure chemical-vapor deposition, the schedulability and scheduling problems are still …
pressure chemical-vapor deposition, the schedulability and scheduling problems are still …
An improved iterative synthesis method for liveness enforcing supervisors of flexible manufacturing systems
Our previous work presented a Petri net-based iterative synthesis policy for deadlock
prevention in flexible manufacturing systems (FMS). Given the Petri net model of an FMS …
prevention in flexible manufacturing systems (FMS). Given the Petri net model of an FMS …
Siphon-based deadlock prevention policy for flexible manufacturing systems
YS Huang, MD Jeng, X Xie… - IEEE Transactions on …, 2006 - ieeexplore.ieee.org
A siphon-based algorithm for deadlock prevention of a type of Petri nets called
hboxS^3hboxPMR, which is a subclass of hboxS^3hboxPGR^2, is presented in this …
hboxS^3hboxPMR, which is a subclass of hboxS^3hboxPGR^2, is presented in this …
Control of elementary and dependent siphons in Petri nets and their application
ZW Li, MC Zhou - IEEE Transactions on Systems, Man, and …, 2007 - ieeexplore.ieee.org
The importance of siphons is well recognized in the analysis and control of deadlocks in a
Petri net. To minimize the number of siphons that have to be explicitly controlled, siphons in …
Petri net. To minimize the number of siphons that have to be explicitly controlled, siphons in …
Deadlock prevention based on structure reuse of Petri net supervisors for flexible manufacturing systems
ZW Li, GY Liu, HM Hanisch… - IEEE Transactions on …, 2011 - ieeexplore.ieee.org
Deadlocks are an undesirable situation in automated flexible manufacturing systems (FMS).
Their occurrences often deteriorate the utilization of resources and may lead to catastrophic …
Their occurrences often deteriorate the utilization of resources and may lead to catastrophic …