J Musil, M Jirout - Surface and Coatings Technology, 2007 - Elsevier
This article reports on the investigation of cracking of hard, 3–5 μm thick Zr–Cu–O, Zr–Cu–C,
Ti–Cu–C and Si–Me–N (Me= Ta, Zr, Mo, W) magnetron sputtered nanostructured films using …